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Journal of vacuum science & technology
Corp./Body Author
American Vacuum Society;American Institute of Physics
Place : Publisher
Washington : American Institute of Physics
From year - To year
1964-1982
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
0022-5355
ISSN-L
0022-5355
UDC code
669; 6
Codice Dewey code
621.55/05
Journal code
P 00046119
Database
acnp
Medium
Printed text
Split into
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Split into
Journal of vacuum science & technology. A. Vacuum, surfaces, and films
Other physical media
Journal of vacuum science and technology (Online)
Permalink
https://acnpsearch.unibo.it/journal/31735
Libraries
23
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