Other titles
Nanotechnology & microelectronics; Journal of vacuum science and technology., International journal devoted to microelectronics and nanometer structures; JVST B, Nanotechnology & microelectronics; Nanotechnology and microelectronics; Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Corp./Body Author
American Vacuum Society;American Institute of Physics
Place : Publisher
New York, NY : AVS through the American Institute of Physics
From year - To year
2010-
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
2166-2746
ISSN-L
2166-2746
Codice Dewey code
621
Journal code
P 00237781
Database
acnp
Medium
Printed text
Journal public access
Other physical media
Libraries
