Other titles
JVST B; Microelectronics and nanometer structures; Journal of vacuum science and technology., Microelectronics and nanometer structures; Journal of vacuum science and technology.. B. Online; Issues for 2003- have issue PDF table of contents title: Journal of vacuum science & technology., An international journal devoted to microelectronics and nanometer structures. Processing, measurement, and phenomena
Corp./Body Author
American Vacuum Society;American Institute of Physics
Place : Publisher
Woodbury, N.Y. : Published for the American Vacuum Society by the American Institute of Physics
From year - To year
1991-2009
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
1520-8567
ISSN-L
1071-1023
Codice Dewey code
621
Journal code
P 00232447
Database
acnp
Medium
On-line (remote)
Journal public access
Other physical media
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