| ACNP Record (derivato) | ISSN Record |
|---|
| Periodico/Rivista | *Journal of vacuum science & technology. B, Microelectronics and nanometer structures | *Journal of vacuum science & technology. B, Microelectronics and nanometer structures |
| Altri Titoli | Journal of vacuum science & technology., International journal devoted to microelectronics and nanometer structures; Microelectronics and nanometer structures; Journal of vacuum science and technology., Microelectronics and nanometer structures; JVST B | Journal of vacuum science & technology., International journal devoted to microelectronics and nanometer structures; Microelectronics and nanometer structures; Journal of vacuum science and technology., Microelectronics and nanometer structures; JVST B |
| Ente/Autore (Marc 710) | American Vacuum Society; American Institute of Physics | American Vacuum Society; American Institute of Physics |
| Editore | Published for the Society by the American Institute of Physics | Published for the Society by the American Institute of Physics |
| Luogo pubblicazione | New York | New York |
| Da anno - Ad anno | 1991-2010 | 1991-2010 |
| Lingua | ENG | ENG |
| Periodicità | BIMESTRALE: 6,7, o 8 numeri l'anno | BIMESTRALE: 6,7, o 8 numeri l'anno |
| Paese | US | US |
| ISSN | 1071-1023 | 1071-1023 |
| ISSN-L | 1071-1023 | 1071-1023 |
| Codice Dewey | 621.381/05 | 621.381/05 |
| Cod. CNR | P 00232448 | PD00519372 |
| Fonte | ACNP | ISSN |
| Supporto | Printed text | Printed text |
| Accesso Pubblico alla rivista: | http://ieeexplore.ieee.org/servlet/opac?punumber=4915583http://scitation.aip.org/jvstb | http://ieeexplore.ieee.org/servlet/opac?punumber=4915583http://scitation.aip.org/jvstb |
| Titoli collegati | GIA': *Journal of vacuum science & technology. B, Microelectronics processing and phenomenaHA PER ALTRO SUPPORTO: *Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)POI: *Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print) | HA PER ALTRO SUPPORTO: *Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)GIA': *Journal of vacuum science & technology. B, Microelectronics processing and phenomenaPOI: *Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print) |
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